wafer相关论文
A kind of 2 GHz to 8GHz MMIC variable gain low noise amplifier chip,WFD0 0 2 0 ,was designed,and fabricated successfully......
Two-dimensional(2D)slab photonic crystal waveguides(PCWGs)on silicon-on-insulator(SOI)wafer were designed and fabricated......
A two-step process of Ni silicide formed on bulk silicon,and the effects of different process conditions,including two-s......
Currently,200 mm wafer foundry companies are beginning to explore production feasibility under ground rules smaller than......
Pit formation and surface morphological evolution in Si(001) homoepitaxy are investigated by using scanning tunneling mi......
Some wafer fabrication processes performed by cluster tools require revisiting. With wafer revisiting, a cluster tool is......
A ball grid array (BGA) package based on Si interposer with through silicon via (TSV) was designed. Thermal behaviors of......
Using Technology Computer-Aided Design(TCAD) 3-D simulation,the single event effect(SEE) of 25 nm raised source-drain Fi......
The planarization mechanism of alkaline copper slurry is studied in the chemical mechanical polishing (CMP) process from......
Firstly, this paper presents an orthogonal test of six factors and five levels, called the chemical mechanical polishing......
We demonstrate and introduce here a pyramidally patterned metal reflector into wafer-bonding AlGaInP light emitting diod......
Electrostatic chucks are one of the core components of semiconductor devices. As a key index of electrostatic chucks, th......
The dream of epitaxially integrating III-nitride semiconductors on large diameter silicon is being fulfilled through the......
We propose a novel silicon optical phase shifter structure based on heterogeneous strip-loaded waveguides on a photonic ......
Thermal characteristics are numerically investigated for the hybrid AlGaInAs/InP on silicon microring lasers with differ......
The gate leakage current and reliability concern become more serious due to the aggressive scaling-down of the gate oxid......
本轮课程改革强调的三维目标中，情感目标成为一个令人瞩目的内容，但纵观课程至今对情感因素的研究，可以发现绝大多数的理解与实践都集......
We present a micro-Pirani vacuum gauge using the low-resistivity monocrystal silicon as the heaters and heat sinks fabri......
A high etch rate GaAs via-hole process was studied in an inductively coupled plasma system using Cl2/BCl3 gas system. Th......
This paper proposes a novel miniature dual-functional sensor integrating both pressure and temperature sensitive units o......
Scalable synthesis of transfer-free graphene over insulators offers exciting opportunity for next-generation electronics......
Yankee Doodle went to town riding on a pony. He stuck a feather in his hat and called it macaroni. ......
Image boundary extraction based on island model genetic algorithms for integrated circuit defect det
该文从挂篮荷载计算、施工流程、支座及临时固结施工、挂篮安装及试验、合拢段施工、模板制作安装、钢筋安装、混凝土的浇筑及养生......
This article aims to develop an effective method to extract manufacturing inteligence for evaluating manufacturing tool ......
Image boundary extraction based on island model genetic algorithms for integrated circuit defect det
The integrated circuit chip with high performance has a high sensitivity to the defects in manufacturing environments. W......
Wafer pre-aligning system is an important component in IC manufacturing industry. A wafer prealigning platform with a CC......
化学机械抛光CMP工艺是集成电路制造的核心技术,90%以上的高端CMP机台设备和抛光液、抛光垫等关键耗材均被国外供应商垄断。阐述CM......
